Effect of annealing atmosphere (CO and N₂ gas flow) on surface morphology and crystal quality of AlN buffer layer

Keyphrases

• Annealing 100%
• Surface Morphology 100%
• Crystal Quality 100%
• AlN Buffer Layer 100%
• Annealing Effect 100%
• N2 Gas Flow 100%
• Flow Surface 100%
• CO Gas 100%
• Annealing Atmosphere 100%
• AlN Film 80%
• N2 Annealing 30%
• Surface Roughness 20%
• Nitrided Layer 20%
• Outgassing 20%
• N2 Atmosphere 20%
• III-nitrides 20%
• Dislocation Density 10%
• Surface Layer 10%
• Thermal Decomposition 10%
• Surface Oxidation 10%
• As-grown 10%
• Large Volume 10%
• Screw Dislocation 10%
• Step-terrace Structure 10%
• Rocking Curve 10%
• High Thermals 10%

Material Science

• Aluminum Nitride 100%
• Surface Morphology 100%
• Buffer Layer 100%
• Gas Flow 100%
• Surface (Surface Science) 71%
• Film 57%
• Annealing 21%
• Surface Roughness 14%
• Nitride Compound 14%
• Density 7%
• Oxidation Reaction 7%
• X-Ray Diffraction 7%
• Screw Dislocation 7%

Engineering

• Surface Morphology 100%
• Gas Flow 100%
• Buffer Layer 100%
• Crystal Quality 100%
• Nitride Layer 50%
• Dislocation Density 25%
• Original Surface 25%
• Surface Layers 25%
• Screw Dislocation 25%