Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding

Shang Pu Wang, Tien Hsiang Lee, You Yuan Chen, Pei Hsun Wang

研究成果: 雜誌貢獻期刊論文同行評審

摘要

In this work, we propose a novel way to flexibly engineer the waveguide dispersion by pat-terning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit.

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文章編號454
期刊Micromachines
13
發行號3
DOIs
出版狀態已出版 - 3月 2022

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