Direct patterning on low dielectric constant materials with electron beam lithography

Ben Chang Chen, Yee Kai Lai, Fu Hsiang Ko, Cheng Tung Chou, Hsuen Li Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

2 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds

Medicine & Life Sciences