Differential confocal microscopy with nanometer depth resolution

Chau Hwang Lee, Jyhpyng Wang

研究成果: 雜誌貢獻會議論文同行評審


The depth resolution of conventional confocal microscopy is limited by the numerical aperture to about 0.5 μm. This paper reports development of a new confocal technique, tentatively called differential confocal microscopy, which can be used to image and profile surface microstructures with depth resolution on the order of 10 nm.

頁(從 - 到)430
期刊Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
出版狀態已出版 - 1996
事件Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA
持續時間: 2 6月 19967 6月 1996


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