Development of CMOS MEMS thermal bimorph actuator for driving microlens

Kah How Koh, Chengkuo Lee, Jyun Hong Lu, Chii Chang Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

6 引文 斯高帕斯(Scopus)

摘要

A CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc.

原文???core.languages.en_GB???
主出版物標題Proceedings - OMN2011
主出版物子標題16th International Conference on Optical MEMS and Nanophotonics
頁面153-154
頁數2
DOIs
出版狀態已出版 - 2011
事件16th International Conference on Optical MEMS and Nanophotonics, OMN2011 - Istanbul, Turkey
持續時間: 8 8月 201111 8月 2011

出版系列

名字International Conference on Optical MEMS and Nanophotonics
ISSN(列印)2160-5033
ISSN(電子)2160-5041

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???event.eventtypes.event.conference???16th International Conference on Optical MEMS and Nanophotonics, OMN2011
國家/地區Turkey
城市Istanbul
期間8/08/1111/08/11

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