Development of chemical sensors using microfabrication and micromachining techniques

Engineering & Materials Science

• Microfabrication 92%
• Micromachining 88%
• Chemical sensors 82%
• Sensors 37%
• Electrochemical devices 29%
• Reactive sputtering 28%
• Anisotropic etching 28%
• Plasma etching 27%
• Solid electrolytes 25%
• Energy utilization 25%
• Suspension bridges 23%
• Tin 21%
• Metallizing 21%
• Heat losses 18%
• Thin films 17%
• Process control 16%
• Diodes 16%
• Oxides 15%
• Membranes 15%
• Silicon 14%
• Metals 11%
• Temperature 7%
• Costs 6%

Chemical Compounds

• Micromachining 100%
• Energy Consumption 53%
• Reactive Sputtering 36%
• Process Control 28%
• Solid Electrolyte 24%
• Etching 21%
• Metal Oxide 20%
• Suspension 18%
• Application 15%
• Plasma 15%
• Reduction 11%

Physics & Astronomy

• micromachining 81%
• sensors 44%
• energy consumption 24%
• environmental control 16%
• solid electrolytes 12%
• sensitivity 12%
• plasma etching 11%
• Schottky diodes 10%
• metal oxides 9%
• selectivity 9%
• tin 9%
• sputtering 8%
• costs 7%
• membranes 7%
• heat 6%
• silicon 5%
• configurations 5%
• thin films 5%
• temperature 3%