Development of a hydrogen gas sensor using microfabrication technology

Chung Chiun Liu, Qinghai Wu, Matthew Stuczynski, George C. Madzsar

研究成果: 雜誌貢獻會議論文同行評審


In recent years, microelectronic fabrication techniques such as photolithographic reduction, thick and thin film and reactive sputtering metallization, chemical and plasma etching, etc. have been applied to the production of miniature and microsize chemical sensors. The introduction of solid electrolytes and conductive polymers further enhances the applicability of electrochemical and chemical sensors, particularly in a gaseous environment. Recent advances in micromachining technology also add new dimensions to the development of chemical sensors.

期刊SAE Technical Papers
出版狀態已出版 - 1992
事件22nd International Conference on Environmental Systems - Seattle, WA, United States
持續時間: 13 7月 199216 7月 1992


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