Development of a full-field polarization interferometer for measurement of wafer surface profile

Keyphrases

• Surface Profile 100%
• Wafer Surface 100%
• Polarization Interferometer 100%
• Field Polarization 100%
• Interference Pattern 66%
• Four-phase 33%
• Quality Control 33%
• Fast Measurement 33%
• Fizeau 33%
• Measurement Resolution 33%
• Phase Quadrature 33%
• Semiconductor Industry 33%
• Control Efficacy 33%
• Product Performance 33%
• Promising Solutions 33%
• Existing Techniques 33%
• Polarization Interferometry 33%
• Polarization Camera 33%
• Manufacturing Efficiency 33%
• Measurement Speed 33%
• Phase-shifting Algorithm 33%
• Experimental Testing 33%
• Polarization Interference 33%
• Surface Profile Measurement 33%

Engineering

• Surface Profile 100%
• Polarization Field 100%
• Interference Pattern 66%
• Interferometry 33%
• Measurement Resolution 33%
• Quality Control 33%
• Product Performance 33%

Chemical Engineering

• Interferometry 100%