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Determination of the mechanical properties of thin films by digital phase shifting interferometry
Chuen Lin Tien, Cheng Chung Lee, Yu Lung Tsai,
Wen Shing Sun
光電科學與工程學系
研究成果
:
雜誌貢獻
›
期刊論文
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同行評審
20
引文 斯高帕斯（Scopus）
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Keyphrases
Mechanical Properties of Thin Films
100%
Phase-shifting Interferometry
100%
Ion Beam Sputtering
50%
Interferometric Techniques
50%
Mechanical Properties
50%
Temperature Effect
50%
Coefficient of Thermal Expansion
50%
Deflection
50%
Deposited Film
50%
Oxide Film
50%
Image Processing Techniques
50%
Coated Substrate
50%
Ion Source
50%
Zernike Polynomial Fitting
50%
Stress Measurement
50%
Internal Stress
50%
Polynomial Coefficients
50%
Contour Plots
50%
Phase Mapping
50%
Thin Oxide Films
50%
Polynomial Fitting Algorithm
50%
Engineering
Thin Films
100%
Interferometry
100%
Oxide Film
100%
Image Processing
50%
Temperature Dependence
50%
Processing Technique
50%
Deposited Film
50%
Coefficient of Thermal Expansion
50%
Internal Stress
50%
Ion Source
50%
Contour Plot
50%
Interferometric Method
50%
Material Science
Thin Films
100%
Oxide Film
100%
Film
50%
Thermal Expansion
50%
Stress Measurement
50%
Sputter Deposition
50%