Design of organic/inorganic multilayer water vapor barrier thin films deposited via plasma polymerization for encapsulation

Keyphrases

• Radius of Curvature 100%
• Barrier Thin Film 100%
• Multilayer Thin Films 100%
• Organic-inorganic 100%
• Plasma Polymerization 100%
• Calcium Assay 100%
• Water Vapor Barrier 100%
• Physical Properties 33%
• Optical Properties 33%
• Polyethylene Terephthalate Substrate 33%
• Network Structure 33%
• Film Thickness 33%
• Hexamethyldisiloxane (HMDSO) 33%
• Barrier Film 33%
• Gas Flow 33%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 33%
• Monolayer Film 33%
• Film Structure 33%
• Surface Profilometry 33%
• Polyethylene Terephthalate 33%
• Organic Thin Films 33%
• Cage-like 33%
• Single-layer Film 33%
• Spectrometry 33%
• Inorganic Thin Film 33%
• Inorganic Encapsulation 33%

Material Science

• Thin Films 100%
• Water Vapor 100%
• Plasma Polymerization 100%
• Film 50%
• Monolayers 25%
• Polyethylene Terephthalate 25%
• Optical Property 12%
• Film Thickness 12%
• Gas Flow 12%
• Plasma-Enhanced Chemical Vapor Deposition 12%
• Physical Property 12%