摘要
In this work, convex diffractive microlenses are designed for fabrication in GaN-based material with a gray-level mask. The aspect ratios of the surface relief of plano-convex and double-convex microlenses for different numerical apertures are compared to reduce the fabrication difficulty. The results show that for the numerical aperture less than 0.6, the aspect ratio of the double-convex diffractive microlenses is around half of the plano-convex diffractive microlenses. For the numerical aperture higher than 0.6, the aspect ratio of the plano-convex diffractive microlenses is similar to the double-convex diffractive microlenses. The error of the surface relief of the microlens occurring during the fabrication process is also discussed.
原文 | ???core.languages.en_GB??? |
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頁(從 - 到) | 569-573 |
頁數 | 5 |
期刊 | Optics and Laser Technology |
卷 | 34 |
發行號 | 7 |
DOIs | |
出版狀態 | 已出版 - 10月 2002 |