Design of GaN convex diffractive microlenses

Chii Chang Chen, Jenq Yang Chang, Gou Chung Chi

研究成果: 雜誌貢獻期刊論文同行評審

6 引文 斯高帕斯(Scopus)

摘要

In this work, convex diffractive microlenses are designed for fabrication in GaN-based material with a gray-level mask. The aspect ratios of the surface relief of plano-convex and double-convex microlenses for different numerical apertures are compared to reduce the fabrication difficulty. The results show that for the numerical aperture less than 0.6, the aspect ratio of the double-convex diffractive microlenses is around half of the plano-convex diffractive microlenses. For the numerical aperture higher than 0.6, the aspect ratio of the plano-convex diffractive microlenses is similar to the double-convex diffractive microlenses. The error of the surface relief of the microlens occurring during the fabrication process is also discussed.

原文???core.languages.en_GB???
頁(從 - 到)569-573
頁數5
期刊Optics and Laser Technology
34
發行號7
DOIs
出版狀態已出版 - 10月 2002

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