@inproceedings{c77d7c22715a4035878061358a044f9a,
title = "Design of a Magnetic Sensor with Controllable Two-Axis Synchronous Motion",
abstract = "This study proposes a MEMS magnetic sensor with controllable two-axis synchronized operation or single-axis coplanar motion enhancement. The device is capable of simultaneously measuring the magnetic field in two axes. At an excitation current of 60 mA, the sensitivity of By is 18.5 V/T and the sensitivity of Bz is 2.9 V/T. Simultaneous measurement of both axes allows for applications in coplanar vector sensing, such as in linkage structures. Additionally, by adjusting the excitation current frequency to enable coplanar motion enhancement, the sensitivity of By increases to approximately 37.5 V/T, nearly doubling its original sensitivity. This configuration is suitable for magnetic field measurements, enabling applications in orientation detection. The chip size is 995×932 μm.",
keywords = "Accelerometer, Magnetic Sensor, Two-axis",
author = "Tai, {Ching Yu} and Chen, {Shih Jui} and Yang, {Yu Lin}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",
year = "2024",
doi = "10.1109/MEMS58180.2024.10439350",
language = "???core.languages.en_GB???",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1003--1006",
booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",
}