Design, fabrication, and mixing characteristics of an electrostatically activated resonant micropump-mixer

Chia Wen Tsao, Kamran Mohseni

研究成果: 雜誌貢獻會議論文同行評審

2 引文 斯高帕斯(Scopus)


An active mixing and pumping strategy is proposed to enhance mixing of two fluids through vortex accumulation by a resonant plate actuation. A resonant micropump-mixer is designed and fabricated, where an electrostatically activated plate is placed at or in close vicinity of the interface between the two incoming streams at the junction of a Y-shaped microchannel. Mixing is enhanced by increased interface area between the two fluids during the vortex formation at the tip of the resonant plate. Fabrication of the micropump-mixer is achieved in two steps. Commercial PolyMUMPs process is initially used to fabricate a resonant plate, where it is eventually packaged into a Y-shaped microchannel. The resonant plate, in this study, has a length of 300 μm, thickness of 1.5 μm, and it is activated by an AC power source, which results in significant oscillation amplitude at the tip of the plate. The Laser Induced Fluorescence (LIF) technique is used for flow visualization and characterization, where effective mixing and pumping capabilities of the micropump-mixer are demonstrated.

頁(從 - 到)115-123
期刊American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
出版狀態已出版 - 2004
事件2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States
持續時間: 13 11月 200419 11月 2004


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