Design and fabrication of Si-based pickup module for optical storage

Keyphrases

• Optical Data Storage 100%
• Si-based 100%
• Optical Element 50%
• Optical Module 50%
• Light Source 50%
• Si Substrate 50%
• Ray Tracing 50%
• System Technology 50%
• Micro-opto-electro-mechanical Systems (MOEMS) 50%
• Spot Size 50%
• Diffractive Optics 50%
• Optical Signal 50%
• SiNx 50%
• Self-alignment 50%
• Light Detector 50%
• Optical Storage Systems 50%
• Optical Operation 50%
• System Assembly 50%
• Membrane Device 50%

Engineering

• Optical Element 100%
• Light Source 50%
• Storage System 50%
• Fits and Tolerances 50%
• Si Substrate 50%
• System Technology 50%
• Spot Size 50%
• Optical Signal 50%
• Assembly System 50%
• Light Detector 50%

Physics

• Light Source 100%
• Optical Communication 100%
• Self Alignment 100%