Design and fabrication of Si-based pickup module for optical storage

Chien Chieh Lee; Chih Ming Wang; Jenq Yang Chang; Gou Chung Chi

doi:10.1117/12.559258

Design and fabrication of Si-based pickup module for optical storage

Chien Chieh Lee, Chih Ming Wang, Jenq Yang Chang, Gou Chung Chi

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

摘要

We have proposed a miniaturized optical signal pickup module comprised of several SiN_x membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

原文	???core.languages.en_GB???
文章編號	48
頁（從 - 到）	378-386
頁數	9
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	5524
DOIs	https://doi.org/10.1117/12.559258
出版狀態	已出版 - 2004
事件	Novel Optical Systems Design and Optimization VII - Denver, CO, United States 持續時間: 2 8月 2004 → 3 8月 2004

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10.1117/12.559258

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title = "Design and fabrication of Si-based pickup module for optical storage",

abstract = "We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.",

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AU - Lee, Chien Chieh

AU - Wang, Chih Ming

AU - Chang, Jenq Yang

AU - Chi, Gou Chung

PY - 2004

Y1 - 2004

N2 - We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

AB - We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

KW - Diffractive optical elements

KW - Microoptoelectromechanical systems

KW - Pickup module

KW - SiN membrane

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

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T2 - Novel Optical Systems Design and Optimization VII

Y2 - 2 August 2004 through 3 August 2004

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Design and fabrication of Si-based pickup module for optical storage

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