Design and fabrication of Si-based pickup module for optical storage

Chien Chieh Lee, Chih Ming Wang, Jenq Yang Chang, Gou Chung Chi

研究成果: 雜誌貢獻會議論文同行評審


We have proposed a miniaturized optical signal pickup module comprised of several SiNx membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (∼0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

頁(從 - 到)378-386
期刊Proceedings of SPIE - The International Society for Optical Engineering
出版狀態已出版 - 2004
事件Novel Optical Systems Design and Optimization VII - Denver, CO, United States
持續時間: 2 8月 20043 8月 2004


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