Design and fabrication of fresnel lens and ZnO thin-film transducer

Min Chun Pan, Tuan Anh Bui, Yu Chuan Nien, Wen Ching Shih

研究成果: 雜誌貢獻期刊論文同行評審

6 引文 斯高帕斯(Scopus)


A four-level Fresnel lens and piezoelectric transducer were fabricated as an ejector using focused ultrasonic energy. The influence of the fabrication parameters on the profile of the focusing lens was investigated. Highly c-axis (002)-oriented ZnO films were successfully deposited on Pt (annealed)/Ti/ SiO2/Si substrates under reasonable conditions, such as RF power of 178W, substrate temperature of 380°C, deposition pressure of 10m Torr, and Ar:O2 gas flow ratio of 50%. These conditions were applied and confirmed through investigating the influence of deposition parameters on the properties of ZnO films.

期刊Japanese Journal of Applied Physics
發行號7 PART 2
出版狀態已出版 - 7月 2011


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