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摘要
This article presents a novel 3-D optical measurement system combining an optical microscope (OM) and a z-axis piezoelectric scanner. The proposed system includes an advanced controller for the piezoelectric scanner and an algorithm to process OM imaging data. The z-axis piezoelectric scanner uses a back-propagation neural network (BPNN) to control the upward movement of the sample in a stepwise manner. At the point where each step induces a small steady-state error, the OM captures an image in that position. Each 2-D OM image undergoes denoising via connected-component labeling (CCL) before being converted into 3-D data via image processing. The layered images are then stacked in a 3-D arrangement to construct an accurate 3-D image of the sample.
原文 | ???core.languages.en_GB??? |
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文章編號 | 1002711 |
期刊 | IEEE Transactions on Instrumentation and Measurement |
卷 | 72 |
DOIs | |
出版狀態 | 已出版 - 2023 |
指紋
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