Deposition of high-quality Ge film on Si by PECVD using GeCl4/H2 for fabricating near-infrared photodiodes

Jyun You Lai, Shang Che Tsai, Ming Wei Lin, Szu yuan Chen

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

5 引文 斯高帕斯（Scopus）

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Keyphrases

Engineering

Material Science

Chemical Engineering