Defects reduction of amorphous silicon thin film in cyanide solution treatment

Chien Chang Chao, Yu Hao Hu, Chung Kung Lai, Jenq Yang Chang

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)

摘要

The KCN aqueous solution is used as the cyanide treatment for the reduction of defect states in amorphous silicon (a-Si:H) thin films. The concentration of the KCN aqueous solution and immersing time are probed to find the optimum condition to improve a-Si:H thin film. After cyanide treatment, the combination between silicon atoms and cyanide ions is confirmed by observing the binding energy of N 1s through x-ray photoelectron spectroscopy (XPS) measurement in 395 eV ∼ 406 eV. In order to determine the penetrating depth of cyanide ions into a-Si:H thin film, the XPS measurement is also applied to detect the N 1s signal after etching processes; the N 1s signal can be detected from surface to the depth of 15 nm. Through the measurement of low temperature cathodoluminescence (CL), higher concentration KCN treatment makes stronger radiation intensity indicates that the reduction of defect states in a-Si:H thin films by the cyanide ions. The ratio between photo-current and dark-current is maximum when a-Si:H thin film is immersed in 0.4 M KCN aqueous solution in two minutes.

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主出版物標題4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
出版狀態已出版 - 2011
事件4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
持續時間: 21 6月 201124 6月 2011

出版系列

名字Proceedings - International NanoElectronics Conference, INEC
ISSN(列印)2159-3523

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???event.eventtypes.event.conference???4th IEEE International Nanoelectronics Conference, INEC 2011
國家/地區Taiwan
城市Tao-Yuan
期間21/06/1124/06/11

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