Decreasing reflection through the mutually positive effects of nanograss and nanopillars

Although individual biomimetic nanograss and nanopillar arrays have been investigated widely to decrease surface reflections in energy applications, there have been few studies using them in combination to improve antireflection properties. By using hydrogen plasma to fabricate a silicon nanograss on a nanopillar array, we could decrease the reflection of the nanograss at longer wavelengths, while decreasing the non-specular reflection of the nanopillars over a wide spectral range. Simulations based on rigorous coupled-wave analysis supported the experimental data. This journal is