Damage of silicon induced by low-energy Ar magnetron discharges

F. Y. Chen, I. Lin, C. H. Lin

研究成果: 雜誌貢獻期刊論文同行評審

9 引文 斯高帕斯(Scopus)

指紋

深入研究「Damage of silicon induced by low-energy Ar magnetron discharges」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds