Cross-grating slit test with an interlacing tip-tilt alignment method

Chao Wen Liang, Chien Fu Ou

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)


The phase-shifting Grating-Slit test has advantages of large measurement dynamic range when using with spatial light modulator (SLM) to generate the illuminating. But the rotary slit in the test does reduce the measuring speed and may cause measurement error if it's not aligned properly with the grating. Thus, a new modulating apparatus is proposed to replace the rotary slit used in the Grating-Slit test. In addition, a pellicle beam splitter is used to make the on-axis measurement possible and the measurement error from misalignment is greatly reduced. With a micro liquid crystal display generating and switching the direction of the illuminating grating, we can simultaneously interlace the tip-tilt direction alignments during measurement.

主出版物標題Optical System Alignment and Tolerancing II
出版狀態已出版 - 2008
事件Optical System Alignment and Tolerancing II - San Diego, CA, United States
持續時間: 10 8月 200811 8月 2008


名字Proceedings of SPIE - The International Society for Optical Engineering


???event.eventtypes.event.conference???Optical System Alignment and Tolerancing II
國家/地區United States
城市San Diego, CA


深入研究「Cross-grating slit test with an interlacing tip-tilt alignment method」主題。共同形成了獨特的指紋。