Controlling the heat, flow, and oxygen transport by double-partitions during continuous Czochralski (CCz) silicon crystal growth

Thi Hoai Thu Nguyen, Jyh Chen Chen, Chun Hsien Li

研究成果: 雜誌貢獻期刊論文同行評審

7 引文 斯高帕斯(Scopus)

摘要

The effect of the depths of two partitions on the heat, flow, and oxygen transport during the CCz growth of an 8-inch diameter silicon crystal is numerically investigated. A crucible in which two partitions are immersed in the silicon melt is so-called a triple-crucible. The different depths of two partitions change the effective wall surface area, which is the main source of oxygen at the growth interface, melt motion, and heat transfer within the crucible. The diffusion and convection of oxygen from the partitions and crucible wall towards the free surface and the crystal-melt (c-m) interface are also affected. The amount of oxygen that dissolves from the effective wall surface into the melt is proportional to the surface temperature and the surface area. The choice of at least one long partition will prevent the entry of unmelted granular silicon into the melt region under the c-m interface. Comparison of various cases shows that when the partition near the c-m interface is longer (90 mm) and the partition near the crucible sidewall is shorter (40 mm), the power consumption and the content of oxygen along the growth interface are lower.

原文???core.languages.en_GB???
文章編號107235
期刊Materials Science in Semiconductor Processing
155
DOIs
出版狀態已出版 - 1 3月 2023

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