Controlling the feature size made by two-photon photopolymerization in a threshold material

Ting Wei Chang, Hong Yao Mong, Jiunn Yuan Lin, Jyhpyng Wang, Chau Hwang Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

The feature size made by two-photon photopolymerization is described by a threshold model. In a negative photoresist SU-8 we show the linewidth fabricated by this nonlinear process is consistent with the prediction of this model.

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主出版物標題Conference on Lasers and Electro-Optics, CLEO 2003
發行者Optica Publishing Group (formerly OSA)
ISBN(電子)1557527334
出版狀態已出版 - 2003
事件Conference on Lasers and Electro-Optics, CLEO 2003 - Baltimore, United States
持續時間: 1 6月 20036 6月 2003

出版系列

名字Optics InfoBase Conference Papers
ISSN(電子)2162-2701

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???event.eventtypes.event.conference???Conference on Lasers and Electro-Optics, CLEO 2003
國家/地區United States
城市Baltimore
期間1/06/036/06/03

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