Controllable photonic mirror fabricated by the atomic layer deposition on the nanosphere template

In this study, a controllable photonic mirror was fabricated using the atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. PS nanospheres were self-assembled on an Al/glass substrate to form the bottom electrode. A 20 nm ALD Al₂O₃film was then coated onto the surface of the reduced PS nanosphere structure. The PS nanospheres were removed in air at 350°C to form hollow Al₂O₃nanospheres. Then a 30 nm indium tin oxide film was sputtered on the hollow nanosphere structure to form the top electrode. The results show that the incorporation of the photonic mirror could control the reflectance to a value of 0.3% per 0.1 V of bias voltage.