@inproceedings{6d6b5a13754c427ab4d2dbba8e855fb7,
title = "Compensated laser encoder with symmetric and quasi-common-path heterodyne interferometry",
abstract = "A novel laser encoder is presented for sub-nanometer displacement measurement. It is based on optical heterodyne interferometry and two arms of compensation optics with a symmetric and quasi-common-path optical configuration in polarization space. High stability and resolution can be achieved for displacement measurements. The theoretical analysis shows that our method can effectively compensate misalignments resulting from the dynamic runout in laser encoders. Experimental results reveal that the laser encoder can measure a displacement in subnanometer scale and in millimeter travel range.",
keywords = "Heterodyne, Laser encoder, Misalignment, Subnanometer",
author = "Hsu, {Cheng Chih} and Lee, {Ju Yi} and Wu, {Chyan Chyi}",
year = "2009",
doi = "10.1117/12.827453",
language = "???core.languages.en_GB???",
isbn = "9780819476722",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Measurement Systems for Industrial Inspection VI",
note = "Optical Measurement Systems for Industrial Inspection VI ; Conference date: 15-06-2009 Through 18-06-2009",
}