@inproceedings{15b7f05b7d52430ba372564a9357ef8f,
title = "Common-path laser encoder for nanopositioning in long travel range",
abstract = "In this paper, a novel common-path diffractive laser encoder is proposed, that can reduce the environmental disturbance at its lowest level. It has promising potential for nanometer resolution and long travel range applications. The experimental results demonstrate the proposed laser encoder has the capability of nanometer scale measurement resolution. And the measurement results for millimeter travel range also match well with ones of the commercial laser interferometer.",
keywords = "Common-path, Laser encoder, Long travel range",
author = "Wu, {Chyan Chyi} and Hsu, {Cheng Chih} and Lee, {Ju Yi} and Cheng, {Chun Yao}",
year = "2011",
language = "???core.languages.en_GB???",
isbn = "9784907764395",
series = "Proceedings of the SICE Annual Conference",
publisher = "Society of Instrument and Control Engineers (SICE)",
pages = "817--820",
booktitle = "SICE 2011 - SICE Annual Conference 2011, Final Program and Abstracts",
note = "50th Annual Conference on Society of Instrument and Control Engineers, SICE 2011 ; Conference date: 13-09-2011 Through 18-09-2011",
}