@inproceedings{3e300e25f95243acb61955314f8b0ad7,
title = "Coefficient of thermal expansion and biaxial modulus of thin films on a thin substrate",
abstract = "A modified Stoney's equation is provided to solve the coefficients of thermal expansion and biaxial modulus of the thin film when the thickness ratio (thin film thickness/substrate thickness) is larger than 1%.",
author = "Kuo, {Chien Cheng} and Chen, {Sheng Hui} and Lee, {Cheng Chung}",
year = "2007",
doi = "10.1364/oic.2007.wd7",
language = "???core.languages.en_GB???",
isbn = "1557528411",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "Optical Interference Coatings, OIC 2007",
note = "Optical Interference Coatings, OIC 2007 ; Conference date: 03-06-2007 Through 03-06-2007",
}