CMOS-Compatible Silicon Etched U-Grooves With Groove-First Fabrication for Nanophotonic Applications

Pei Hsun Wang, Hung Chun Liu, Hung Yu Chen, Yi Xian Zhong, Kuan Heng Chen

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds