CMOS-compatible generation of self-organized 3-D Ge quantum dot array for photonic and thermoelectric applications

Ching Chi Wang, Kuan Hung Chen, Inn Hao Chen, Wei Ting Lai, Hung Tai Chang, Wen Yen Chen, Jung Chao Hsu, Shen Wei Lee, Tzu Min Hsu, Ming Tsung Hung, Pei Wen Li

研究成果: 雜誌貢獻期刊論文同行評審

9 引文 斯高帕斯(Scopus)

摘要

We demonstrate a CMOS-compatible scheme, selective oxidation of SiGe pillars, for creating well-organized 3-D Ge quantum dot (QD) array by guiding QDs migration along the oxidation path and thus placing them on targeted locations where the ultimate oxidation occurs. Stacked QDs exhibit tunable luminescence over the visible and possess low thermal conductivity, showing promise for nanophotonic and energy conversion devices.

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文章編號6210389
頁(從 - 到)657-660
頁數4
期刊IEEE Transactions on Nanotechnology
11
發行號4
DOIs
出版狀態已出版 - 2012

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