Chemical waste management in the U.S. semiconductor industry

Chien Wen Shen, Phung Phi Tran, Pham Thi Minh Ly

研究成果: 雜誌貢獻期刊論文同行評審

21 引文 斯高帕斯(Scopus)

摘要

Sustainability has become the biggest concern of the semiconductor industry because of hundreds of high-purity organic and inorganic compounds involved in manufacturing semiconductors not being treated economically. The aim of this study was to understand how semiconductor companies manage their chemical wastes, by analyzing the U.S. Environmental Protection Agency's Toxics Release Inventory data for hydrogen fluoride, nitric acid, ammonia, N-methyl-2-pyrrolidone, hydrochloric acid, nitrate compounds, and sulfuric acid. Cluster analysis was adopted to classify the U.S. semiconductor companies into different performance groups according to their waste management approaches. On the basis of the results, twenty-seven companies were classified in the "best performance" category for the waste management of two or more chemicals. However, 15 companies were classified in the worst performance categories. The semiconductor companies can refer to our results to understand their performance and which companies they should benchmark regarding chemical waste management. City governments can also refer to our results to employ suitable policies to reduce the negative impacts of the chemical waste from regional semiconductor companies.

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文章編號1545
期刊Sustainability (Switzerland)
10
發行號5
DOIs
出版狀態已出版 - 13 5月 2018

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