Chemical microsensors

The silicon-based processing technique known as microelectromechanical systems (MEMS) and their use in fabrication of chemical sensing microsystem is discussed. The techniques enables the fabrication of new sensor structures and sensor arrays with high capabilities and limited size, weight and power consumption. The MEMS technology provides the advantage of producing microsize structures in identical, highly uniform and geometrically well-defined manner. It is suggested that successful MEMS technologies are expected to batch process many sensors with reproducible features and improved capabilities.