Characterization of non-polar surfaces in HVPE grown gallium nitride

Kun Yu Lai, Judith A. Grenko, V. D. Wheeler, Mark Johnson, E. A. Preble, N. Mark Williams, A. D. Hanser

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

Non-polar surfaces of HVPE grown GaN were characterized by cathodoluminescence (CL), scanning electron microscopy (SEM), and secondary ion mass spectrometry (SIMS). Both of a- and m-plane GaN were prepared by growing thick GaN along the c-axis, and cutting in transverse orientations. The exposed non-polar surfaces were prepared by mechanical polishing (MP) and chemically mechanical polishing (CMP). Non-uniform luminescent characteristics on a- and m-plane GaN were observed in CL images, indicating a higher concentration of impurities in the area of more luminescence. CL spectra from the bulk samples revealed two peaks: 364 nm and 510 nm, related to band edge and impurity defects respectively. The detection by SIMS confirmed that oxygen was inhomogeneously incorporated during the growth of thick GaN layers. Surface qualities of a- and m-plane GaN were also investigated. The lower optical intensities from a-plane GaN at low acceleration voltages indicated more surface damages were introduced during polish. The optical intensity difference from the two samples was reduced at higher acceleration voltages. Similar CL intensities at low acceleration voltages from a- and m-plane GaN substrates prepared by CMP indicated improved surface qualities.

原文???core.languages.en_GB???
主出版物標題Advances in III-V Nitride Semiconductor Materials and Devices
發行者Materials Research Society
頁面306-311
頁數6
ISBN(列印)9781604234114
DOIs
出版狀態已出版 - 2006
事件2006 MRS Fall Meeting - Boston, MA, United States
持續時間: 27 11月 20061 12月 2006

出版系列

名字Materials Research Society Symposium Proceedings
955
ISSN(列印)0272-9172

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???event.eventtypes.event.conference???2006 MRS Fall Meeting
國家/地區United States
城市Boston, MA
期間27/11/061/12/06

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