Characterization of low temperature GaAs grown by molecular beam epitaxy

W. C. Lee, T. M. Hsu, J. I. Chyi, G. S. Lee, W. H. Li, K. C. Lee

研究成果: 雜誌貢獻期刊論文同行評審

5 引文 斯高帕斯(Scopus)


Low temperature GaAs has been grown by molecular beam epitaxy at substrate temperatures between 200°C-400°C, and subsequently annealed in the growth chamber at 600°C. These samples have been characterized by X-ray and Raman spectroscopy. From the rocking curve of a high resolution double crystal X-ray diffraction system we observed that GaAs layers grown at low temperatures were highly strained and contained about 1% excess arsenic. These results have been compared with an analysis of LO and TO frequency splitting in the Raman spectra.

頁(從 - 到)66-69
期刊Applied Surface Science
出版狀態已出版 - 2月 1996


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