Characteristic studies on the Zr-based metallic glass thin film fabricated by magnetron sputtering process

C. W. Chu, Jason S.C. Jang, G. J. Chen, S. M. Chiu

研究成果: 雜誌貢獻期刊論文同行評審

28 引文 斯高帕斯(Scopus)

摘要

The Zr61All7.5Ni10Cu17.5Si4 amorphous alloy (ZrAlNiCuSi) was selected as the target material for preparing a series of thin film coatings on the 304 stainless steel substrate by magnetron sputtering process. The microstructure of these as-prepared ZrAlNiCuSi and (ZrAlNiCuSi)N thin films were examined by X-ray diffraction and TEM observation. In parallel, the properties characterization of these ZrAlNiCuSi and (ZrAlNiCuSi)N alloy thin films including hardness measurement by nano indentation, wetting ability by contact angle measurement, adhesion capability by scratch test, surface roughness analyzed by atomic force microscopy (AFM) and the wear resistance evaluated by pin-on disc method were investigated and compared to the commercial hard coatings. The results revealed that all of these ZrAlNiCuSi and (ZrAlNiCuSi)N thin films present a typical amorphous microstructure and smooth surface with roughness about 1 nm. This feature makes these amorphous ZrAlNiCuSi and (ZrAlNiCuSi)N thin films posses a lower wettability as well as a higher wear resistance.

原文???core.languages.en_GB???
頁(從 - 到)5564-5566
頁數3
期刊Surface and Coatings Technology
202
發行號22-23
DOIs
出版狀態已出版 - 30 8月 2008

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