Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

Che Lung Hsu, Yung Chih Liu, Chih Ming Wang, Mount Learn Wu, Ya Lun Tsai, Yue Hong Chou, Chien Chieh Lee, Jenq Yang Chang

研究成果: 雜誌貢獻期刊論文同行評審

39 引文 斯高帕斯(Scopus)

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Physics & Astronomy