Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

Youngki Choe; Shih Jui Chen; Eun Sok Kim

Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

Youngki Choe, Shih Jui Chen, Eun Sok Kim

機械工程學系

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

摘要

This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright

原文	???core.languages.en_GB???
頁面	1764-1784
頁數	21
出版狀態	已出版 - 2010
事件	International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010 - Scottsdale and Fountain Hills, AZ, United States 持續時間: 8 3月 2010 → 11 3月 2010

???event.eventtypes.event.conference???

???event.eventtypes.event.conference???	International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010
國家/地區	United States
城市	Scottsdale and Fountain Hills, AZ
期間	8/03/10 → 11/03/10

引用此

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abstract = "This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright",

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Choe, Y, Chen, SJ & Kim, ES 2010, 'Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation', 論文發表於 International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010, Scottsdale and Fountain Hills, AZ, United States, 8/03/10 - 11/03/10 頁 1764-1784.

Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation. / Choe, Youngki; Chen, Shih Jui; Kim, Eun Sok.
2010. 1764-1784 論文發表於 International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010, Scottsdale and Fountain Hills, AZ, United States.

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

TY - CONF

T1 - Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

AU - Choe, Youngki

AU - Chen, Shih Jui

AU - Kim, Eun Sok

PY - 2010

Y1 - 2010

N2 - This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright

AB - This paper describes a microspeaker (composed of a mechanically polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 16kHz. The microspeaker with an encapsulating cylindrical package of about 0.5cc inside volume produces sound pressure level (SPL) of 103.6 ~ 110 dB between 1.3 and 12 kHz when measured 5 mm away from the diaphragm with 190Vpeak-topeak sinusoidal driving signal. Copyright

KW - Mechanically polished

KW - Mems microspeaker

KW - Piezoelectric bimorph

KW - Pzt

KW - Pzt diaphragm

KW - Uniform displacement

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M3 - 會議論文

AN - SCOPUS:84880048699

SP - 1764

EP - 1784

T2 - International Conference and Exhibition on Device Packaging 2010, Held in Conjunction with the Spring Conference on Global Business Council, GBC 2010

Y2 - 8 March 2010 through 11 March 2010

ER -

Bimorph diaphragm formed by two PZT sheets on micromachined silicon for sound generation

摘要

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