@inproceedings{df6cbd0e3911434784074611c1c04836,
title = "Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering",
abstract = "we propose an automatic wafer defect maps detection method based on unsupervised learning. There is no need for human labeling, and similar defect clusters are identified automatically without human intervention. As a result, the process is less error-prone. Whenever the wafer test result of a WUT is available, it can be compared immediately with existing clusters. If the wafer map matches one of the known defect patterns, then RCA can be done efficiently.",
keywords = "clustering, defect pattern, machine learning, mask, wafermap, yield learning",
author = "Li, {Katherine Shu Min} and {Li-Yang Chen}, Leon and Cheng, {Ken Chau Cheung} and {Yi-Yu Liao}, Peter and Wang, {Sying Jyan} and Huang, {Andrew Yi An} and Nova Tsai and Leon Chou and Han, {Gus Chang Hung} and Jwu-E Chen and Liang, {Hsing Chung} and Hsu, {Chun Lung}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 26th IEEE European Test Symposium, ETS 2021 ; Conference date: 24-05-2021 Through 28-05-2021",
year = "2021",
month = may,
day = "24",
doi = "10.1109/ETS50041.2021.9465457",
language = "???core.languages.en_GB???",
series = "Proceedings of the European Test Workshop",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "Proceedings - 2021 IEEE European Test Symposium, ETS 2021",
}