@inproceedings{44a3420a601945e99289f4f21e26575d,
title = "Arrayed, piezoelectrically-actuated mirrors and gratings for spectrometer",
abstract = "This paper describes a technology for a compact spectrometer based on a 2D piezoelectric mirror and/or grating array. The piezoelectric mirror/grating array is composed of angularly movable, 2-D array of micromirrors/microgratings that is supported on piezoelectric cantilevers, and can be driven piezoelectrically with controllable tilt angle in both upward and downward directions. A large reflecting/diffractive surface is obtained through a combination of the small-sized mirrors/gratings that are surface-micromachined without fabrication difficulties associated with a large size mirror/grating.",
keywords = "Actuated micromirror, Grating, MEMS spectrometer, Mirror array, Piezoelectric",
author = "Chen, {Shih Jui} and Derrick Chi and Joe Lo and Kim, {Eun Sok}",
year = "2010",
language = "???core.languages.en_GB???",
isbn = "9781439834022",
series = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010",
pages = "324--327",
booktitle = "Nanotechnology 2010",
note = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 ; Conference date: 21-06-2010 Through 24-06-2010",
}