Anisotropic wet etching on birefringent calcite crystal

C. M. Wang, Y. C. Chang, C. D. Sung, H. T. Tien, C. C. Lee, J. Y. Chang

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)


In this paper, a mechanism for wet etching on birefringent calcite crystal is discussed. By altering the etchant type, its concentration and the stirring speed, the etching mechanism can be confined within the surface reaction regime, resulting in anisotropic etching. Acetic acid can be used to form V shapes defined by the {101̄1} planes with an intersecting angle of 51 degree. V-groove and blazed grating, with a grating period as small as 2 μm, were successfully fabricated. Such gratings can be used as transmission and reflection devices in the visible and infrared ranges. In addition, a transmission polarization dependent device can also be made by covering the calcite with index matching material.

頁(從 - 到)851-854
期刊Applied Physics A: Materials Science and Processing
出版狀態已出版 - 9月 2005


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