Angular-interrogation attenuated total reflection metrology system for plasmonic sensors

Jenq Nan Yih, Fan Ching Chien, Chun Yun Lin, Hon Fai Yau, Shean Jen Chen

研究成果: 雜誌貢獻回顧評介論文同行評審

31 引文 斯高帕斯(Scopus)

摘要

We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupledwaveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10-4 deg.

原文???core.languages.en_GB???
頁(從 - 到)6155-6162
頁數8
期刊Applied Optics
44
發行號29
DOIs
出版狀態已出版 - 10 10月 2005

指紋

深入研究「Angular-interrogation attenuated total reflection metrology system for plasmonic sensors」主題。共同形成了獨特的指紋。

引用此