Analysis of arrayed nanocapacitor formed on nanorods by flow-rate interruption atomic layer deposition

Bo Cheng Lin, Ching Shun Ku, Hsin Yi Lee, Subhendu Chakroborty, Albert T. Wu

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

6 引文 斯高帕斯（Scopus）

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Keyphrases

Engineering

Material Science

Chemical Engineering