Alternative displacement sensor with reflection type holographic grating

Yao Yaun Ho, Zhi Ru Lin, Cheng Chih Hsu, Chyan Chyi Wu, Ju Yi Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this study, we proposed an alternative displacement sensor which constructed with reflection type holographic diffraction grating. To integrate with the truly phase detection heterodyne interferometer, and then the in-plane displacement can be measured with sub-nanometer displacement resolution. The smallest variation can be observed of proposed method is approximately 20 pm and there are no significant differences between proposed method and comparison methods. Furthermore, we evaluated the thermal property of the hologram and showed that the grating pitch variation is smaller than 0.1 nm for temperature variations within 1 °C. According to these findings, we can conclude that the holographic grating can be an alternative displacement sensor with high sensitivity and high stability.

原文???core.languages.en_GB???
主出版物標題International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
DOIs
出版狀態已出版 - 2013
事件International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, Singapore
持續時間: 9 4月 201311 4月 2013

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
8769
ISSN(列印)0277-786X
ISSN(電子)1996-756X

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???event.eventtypes.event.conference???International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
國家/地區Singapore
城市Singapore
期間9/04/1311/04/13

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