AlGaN/GaN high electron mobility transistors with a p-Type GaN cap layer

H. C. Tsai, S. C. Fan Chiang, Y. N. Zhong, Y. M. Hsin

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

In this work, AlGaN/GaN HEMTs with different types of p-GaN cap layers were fabricated and investigated. The p-GaN cap layer used in this study was for passivation study instead of forming enhancement-mode operation. The differences in p-GaN cap layers were Mg-doping concentration (1x10" and 3xl01 9 cm"1) and thickness (5 and 8 nm). Device with p-GaN cap of 8-nm and Mg-doping of 3x10" cm'3 showed the lowest gate leakage current, highest on/off current ratio (1.02xl06), highest breakdown voltage and least current collapse characteristics.

原文???core.languages.en_GB???
主出版物標題ECS Transactions
編輯J. Hite, V. Chakrapani, J. Zavada, T. J. Anderson, S. Kilgore
發行者Electrochemical Society Inc.
頁面53-57
頁數5
版本7
ISBN(電子)9781607688358
ISBN(列印)9781607688358
DOIs
出版狀態已出版 - 2018
事件Symposium on Wide Bandgap Semiconductor Materials and Devices 19 - 233rd ECS Meeting - Seattle, United States
持續時間: 13 5月 201817 5月 2018

出版系列

名字ECS Transactions
號碼7
85
ISSN(列印)1938-6737
ISSN(電子)1938-5862

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???event.eventtypes.event.conference???Symposium on Wide Bandgap Semiconductor Materials and Devices 19 - 233rd ECS Meeting
國家/地區United States
城市Seattle
期間13/05/1817/05/18

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