Air-core hollow optical waveguides with omnidirectional reflectors

Shih Shou Lo, Chii Chang Chen

研究成果: 雜誌貢獻期刊論文同行評審

1 引文 斯高帕斯(Scopus)

摘要

We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a0 silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO2 (0.111/0.258 μm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.

原文???core.languages.en_GB???
文章編號044601
期刊Optical Engineering
45
發行號4
DOIs
出版狀態已出版 - 4月 2006

指紋

深入研究「Air-core hollow optical waveguides with omnidirectional reflectors」主題。共同形成了獨特的指紋。

引用此