Adaptive optics integrated surface roughness measurement of sputtered PT film on silicon substrate

Yiin Kuen Fuh, Chia He Wang

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)

摘要

A new optical inspection system for in situ surface roughness measurement of sputtered Pt film on silicon is developed. In this study, we present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics (AO) for aberration correction. The aim of this study was to demonstrate the necessity for AO compensation in regions containing turbulences. Measurement results of eight Pt film on top of P-type silicon wafer samples with a roughness ranging from 58 to 83 nm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R2) of 0.9963. The proposed AO-assisted system is in good agreement with stylus method and less than 0.70% error values are obtained for the aforementioned average sample roughness. The proposed system can be used as a rapid in-process roughness monitor to further improve the stability of thin film-sputtering processes in situ.

原文???core.languages.en_GB???
頁(從 - 到)2055-2059
頁數5
期刊Microwave and Optical Technology Letters
55
發行號9
DOIs
出版狀態已出版 - 9月 2013

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