@inproceedings{09968f07b8ea4c71a24c53e804833318,
title = "Acoustic transducers built on edge-released MEMS structures",
abstract = "This paper presents acoustic transducers built on edge-released MEMS structures, i.e., cantilever diaphragm and spiral-beam-supported diaphragm that are designed to release residual stress and also to avoid in-plane tension when bent. Sputter-deposited ZnO on the diaphragms is used as the piezoelectric thin film to sense and generate acoustic pressure. Typical diameter and thickness of the edge-released diaphragm are 1 mm and 1.6 µm, respectively. The maximum strain on the spiral-beam-supported diaphragm is about an order of magnitude larger than that of a cantilever diaphragm transducer for a given pressure level and diaphragm size. The spiral offers a higher sensitivity at the cost of a lower usable bandwidth and less tolerance on the fabrication process variation.",
author = "Chen, {Shih Jui} and Youngki Choe and Kim, {Eun Sok}",
note = "Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",
year = "2010",
doi = "10.31438/trf.hh2010.62",
language = "???core.languages.en_GB???",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "234--237",
editor = "Monk, {David J.} and Turner, {Kimberly L.}",
booktitle = "2010 Solid-State Sensors, Actuators, and Microsystems Workshop",
}