Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications

Ning Hsiu Yuan, Chih Chia Chen, Yiin Kuen Fuh, Tomi T. Li

研究成果: 雜誌貢獻期刊論文同行評審

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds