Acoustic Performance of Stress Gradient-Induced Deflection of Triangular Unimorphic/Bimorphic Cantilevers for MEMS Applications

Ning Hsiu Yuan, Chih Chia Chen, Yiin Kuen Fuh, Tomi T. Li

研究成果: 雜誌貢獻期刊論文同行評審

摘要

This paper reports two piezoelectric materials of lead zirconium titanate (PZT) and aluminum nitride (AlN) used to simulate microelectromechanical system (MEMS) speakers, which inevitably suffered deflections as induced via the stress gradient during the fabrication processes. The main issue is the vibrated deflection from the diaphragm that influences the sound pressure level (SPL) of MEMS speakers. To comprehend the correlation between the geometry of the diaphragm and vibration deflection in cantilevers with the same condition of activated voltage and frequency, we compared four types of geometries of cantilevers including square, hexagon, octagon, and decagon in triangular membranes with unimorphic and bimorphic composition by utilizing finite element method (FEM) for physical and structural analyses. The size of different geometric speakers did not exceed 10.39 mm2; the simulation results reveal that under the same condition of activated voltage, the associated acoustic performance, such as SPL for AlN, is in good comparison with the simulation results of the published literature. These FEM simulation results of different types of cantilever geometries provide a methodology design toward practical applications of piezoelectric MEMS speakers in the acoustic performance of stress gradient-induced deflection in triangular bimorphic membranes.

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文章編號2129
期刊Materials
16
發行號5
DOIs
出版狀態已出版 - 3月 2023

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