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A thermopile device with sub-wavelength hole arrays by cmos-mems technology
Chi Feng Chen
, Chih Hsiung Shen, Yun Ying Yeh
機械工程學系
研究成果
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雜誌貢獻
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期刊論文
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Keyphrases
MEMS Technology
100%
Thermopile
100%
Subwavelength Hole Array
100%
Infrared Absorption
80%
Array Structure
40%
Active Area
40%
Hole Structure
40%
Taiwan
20%
Measurement Results
20%
Manufacturing Firms
20%
Finite-difference Time-domain Method
20%
Rectangle
20%
Complementary Metal Oxide Semiconductor
20%
Micro-electro-mechanical Systems
20%
Semiconductor Manufacturing
20%
Structural Effect
20%
System Process
20%
Square Hole
20%
Subwavelength Structures
20%
Hexagonal Structure
20%
Structure Line
20%
Circular Hole
20%
Simulation Technology
20%
Structural Optimization
20%
Absorption Efficiency
20%
Symmetric Square
20%
Subwavelength Holes
20%
Elliptical Hole
20%
Engineering
Thermopile
100%
Mem Technology
100%
Simulation Result
40%
Active Area
40%
Hole Structure
40%
Time Domain Processing
20%
Complementary Metal-Oxide-Semiconductor
20%
Semiconductor Manufacturing
20%
Infrared Absorption
20%
Micro-Electro-Mechanical System
20%
Manufacturing Company
20%
Line Width
20%
Circular Hole
20%
Structural Effect
20%
Target Temperature
20%
Elliptical Hole
20%
Material Science
Microelectromechanical System
100%
Complementary Metal-Oxide-Semiconductor Device
100%
Linewidth
100%
Finite Difference Method
100%